Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 64-67

  De Koninck, D A ^a   Lopez, F Molina ^a   Briand, D ^a   De Rooij, N F ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION METHOD; FUEL COMBUSTION; FUEL MIXTURES; LOW TEMPERATURES; PHOTO-DEFINABLE; SEMI-ANALYTICAL MODEL;

ACTUATORS; FABRICATION; FUELS; LAMINATING; MEMS;

BALLOONS;

EID: 84860464108     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170094     Document Type: Conference Paper

References (9)

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