Carbon nanotubes/ceria composite layers deposited on surface acoustic wave devices for gas detection at room temperature

Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4786-4791

  David, M ^a   Arab, M ^a   Martino, C ^a   Delmas, L ^b   Guinneton, F ^a   Gavarri, J R ^a  

^a UNIVERSITÉ DE TOULON   (France)

^b SENSEOR   (France)

Author keywords

AT cut SAW resonator; Carbon nanotubes; Cerium oxide; Gas sensor; Nanocomposite

Indexed keywords

ACETONE VAPORS; CATALYTIC CHEMICAL VAPOR DEPOSITION; CERIUM OXIDES; COMPOSITE LAYER; ETHANOL VAPOR; FREQUENCY CHANGES; FREQUENCY SHIFT; GAS DETECTION; NANO-SIZED; OUTPUT SIGNAL; PIEZOELECTRIC SUBSTRATES; QUARTZ RESONATORS; ROOM TEMPERATURE; SAW DEVICE; SAW GAS SENSORS; SAW RESONATORS; SENSITIVE LAYERS; SENSOR RESPONSE; SURFACE ACOUSTIC WAVE SENSORS; SURFACE CONDUCTIVITY; TEST DEVICE; TRANSMISSION ELECTRON;

ACETONE; ACOUSTIC SURFACE WAVE DEVICES; ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CERIUM COMPOUNDS; CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ETHANOL; GAS DETECTORS; NANOCOMPOSITES; RESONATORS; SENSORS; VAPORS; X RAY DIFFRACTION;

NANOCOMPOSITE FILMS;

EID: 84860310789     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.166     Document Type: Conference Paper

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