Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes

Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4820-4822

  Mantovan, R ^a   Vangelista, S ^a   Kutrzeba Kotowska, B ^a   Cocco, S ^a   Lamperti, A ^a   Tallarida, G ^a   Mameli, D ^a,b   Fanciulli, M ^a,c  

^a LABORATORIO MDM   (Italy)

^b UNIVERSITY OF CAGLIARI   (Italy)

^c UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Atomic layer deposition; Chemical vapor deposition; Magnetic tunnel junctions; Thin films; Tunnel magnetoresistance

Indexed keywords

ATOMIC LAYER; CHEMICAL VAPOR; CHEMICAL VAPOR DEPOSITION PROCESS; CORE ELEMENTS; FERROMAGNETIC ELECTRODES; IN-SITU; MAGNETIC TUNNEL JUNCTION; MORPHOLOGICAL CHARACTERIZATION; OXIDE LAYER; SPIN-BASED DEVICES; TUNNEL MAGNETORESISTANCE; TUNNEL MAGNETORESISTANCE EFFECTS; TUNNEL OXIDES; ULTRA-THIN;

ATOMIC LAYER DEPOSITION; CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; FERROMAGNETIC MATERIALS; FERROMAGNETISM; MAGNETORESISTANCE; THIN FILMS; VAPORS;

MAGNETIC DEVICES;

EID: 84860278056     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.08.037     Document Type: Conference Paper

References (9)

1. C. Chappert, A. Fert, and F. Nguyen Van Dau Nat. Mater. 6 2007 813
2. R. Bubber, M. Mao, T. Schneider, H. Hegde, K. Sin, S. Funada, and S. Shi IEEE Trans. Magn. 38 5 2002 2724
3. C. A. M. Knechten, Plasma oxidation for magnetic tunnel junctions (Ph. D Thesis), Eindhoven University of Technology, 2005.
4. M. Ritala, and J. Niinistö Chemical Vapour Deposition: Precursors, Processes and Applications 2009 The Royal Society of Chemistry
5. R. Mantovan, A. Lamperti, M. Georgieva, G. Tallarida, and M. Fanciulli J. Phys. D: Appl. Phys. 43 2010 065002
6. R. Mantovan, S. Cocco, S. Vangelista, Laboratorio MDM, IMM-CNR, Agrate Brianza (MB), Italy, private commun
7. Inorganic Crystal Structure Database, National Institute of Standards and Technology (NIST) and Fachinformationszentrum Karlsruhe (FIZ), Edition 1-2008: 44989 (Co), 631729 (α-Fe), 29081 (CoO), 82237 (Fe3O4), 82137 (α-Fe2O3), and 9863 (MgO).
8. J. Daillant, and A. Gibaud X-ray and Neutron Reflectivity 2009 Springer Verlag
9. O. Kitakami, H. Sato, Y. Shimada, F. Sato, and M. Tanaka Phys. Rev. B 56 1997 13849