Monitoring of temperature distribution in a thin film heater by an array of a-Si:H temperature sensors

IEEE Sensors Journal

Volumn 12, Issue 5, 2012, Pages 1209-1213

  Caputo, Domenico ^a   De Cesare, Giampiero ^a   Nardini, Massimo ^a   Nascetti, Augusto ^a   Scipinotti, Riccardo ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Amorphous silicon; temperature sensors; thin film heater

Indexed keywords

A-SI:H; AMORPHOUS SILICON (A-SI:H); ELECTROSTATIC PROBLEMS; FORWARD CURRENTS; GLASS SLIDES; HEATER GEOMETRY; HEATER SURFACE; JOULE EFFECTS; LAB-ON-CHIP; LAB-ON-CHIP SYSTEMS; MEASURED DATA; MULTI-PHYSICS; NONUNIFORM TEMPERATURE; OPERATING CONDITION; PIN DIODE; SPATIAL TEMPERATURE DISTRIBUTION; THIN FILM HEATERS;

AMORPHOUS SILICON; DIODES; SERPENTINE; SILICON; TEMPERATURE DISTRIBUTION; TEMPERATURE SENSORS;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 84859972399     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2167506     Document Type: Article

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