A-Si:H temperature sensor integrated in a thin film heater

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 3, 2010, Pages 708-711

  Caputo, D ^a   De Cesare, G ^a   Nascetti, A ^a   Scipintti, R ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; BIO-MOLECULAR; BOTTOM CONTACTS; EXPONENTIAL BEHAVIORS; FINITE ELEMENT SIMULATORS; FIXED VOLTAGE; FORWARD BIAS; GLASS SLIDES; HYDROGENATED AMORPHOUS SILICON (A-SI:H); P-TYPE; POLYDIMETHYLSILOXANE PDMS; REVERSE BIAS; SENSOR RESPONSE; SPUTTERED FILMS; STACKED STRUCTURE; TEMPERATURE CURVES; THIN FILM HEATERS; UNIFORM TEMPERATURE;

AMORPHOUS FILMS; AMORPHOUS SILICON; PLASMA DEPOSITION; SERPENTINE; SILICATE MINERALS; SILICONES; SURFACE STRUCTURE; TEMPERATURE; TEMPERATURE SENSORS; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77950998007     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200982719     Document Type: Article

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