Fabrication and experimental characterization of nanochannels

Journal of Heat Transfer

Volumn 134, Issue 5, 2012, Pages

  Phan, Vinh Nguyen ^a   Nguyen, Nam Trung ^a   Yang, Chun ^a   Joseph, Pierre ^b,c   Gué, Anne Marie ^b,c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b LAAS CNRS   (France)

^c UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

capillary filling; DRIE; micromachining; nanochannels; nanofluidics; RIE

Indexed keywords

ANODIC BONDING; AUTOMATIC IMAGE PROCESSING; CAPILLARY FILLING; CHANNEL HEIGHT; CHANNEL WIDTHS; CONVENTIONAL THEORY; DEEP REACTIVE ION ETCHING; DRIE; DYNAMIC PROCESS; ETCHING RATE; EXPERIMENTAL CHARACTERIZATION; EXPOSURE-TIME; FLUID FLOWING; FLUORESCENT MOLECULES; FLUORESCENT SIGNALS; FLUORESCENT TECHNIQUE; LATERAL DIMENSION; MICROMETER SCALE; NANO CHANNELS; NANO SCALE; ONE DIMENSION; PYREX GLASS; SCIENCE AND TECHNOLOGY; SMALL CHANNELS; VISIBLE WAVELENGTHS;

CHARACTERIZATION; ELECTRON BEAM LITHOGRAPHY; FILLING; FLUORESCENCE; GLASS; IMAGE PROCESSING; MICROCHANNELS; MICROMACHINING; NANOFLUIDICS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; REFRACTIVE INDEX; SILICON WAFERS; VISUALIZATION;

FABRICATION;

EID: 84859902575     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.4005702     Document Type: Article

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