High performance hard carbon coatings (diamond-like coatings): The family of coating types from Sulzer Metco Thin Film

Vakuum in Forschung und Praxis

Volumn 24, Issue 2, 2012, Pages 18-23

  Vetter, Jörg ^a   Ackerman, Cyndi ^a   Meunier, Frederic ^a   Jarry, Olivier ^a   Schumacher, Dan ^a   Erkens, Georg ^a  

^a Sulzer Metaplas   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION METHODS; DIAMOND-LIKE COATING; DLC COATINGS; ELECTRICAL CONDUCTIVITY; ELECTRON BEAM EVAPORATION; HARD CARBON; INDUSTRIAL SCALE; REACTIVE MAGNETRON SPUTTERING; SULZER METCO; TOP COATING;

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; THIN FILMS; TUNGSTEN;

HARD COATINGS;

EID: 84859458354     PISSN: 0947076X     EISSN: 15222454     Source Type: Journal    
DOI: 10.1002/vipr.201200484     Document Type: Article

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