High-throughput process parallelization for laser surface modification on Si-Solar cells: Determination of the process window

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8244, Issue , 2012, Pages

  Schütz, Viktor ^a   Horn, Alexander ^a   Stute, Uwe ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Mc silicon solar cells; Process parallelization; Surface modification

Indexed keywords

CYCLE TIME; EFFICIENCY GAIN; HIGH-THROUGHPUT; IN-LINE; INTERACTION ZONE; IS PROCESS; LASER PROCESS; LASER SURFACE MODIFICATION; MICROMETER SCALE; MULTIPLE SET; NON-CONTACT; OPTICAL PARAMETER; OPTIMIZED PROCESS; PARALLEL A; PARALLEL PROCESSING; PARALLELIZATIONS; PROCESS WINDOW; REPETITION RATE; SILICON SURFACES; SINGLE PROCESS; SURFACE TOPOLOGY; UPSCALING; WAFER PROCESSING;

DIFFRACTIVE OPTICAL ELEMENTS; EFFICIENCY; SURFACE TREATMENT; TOPOLOGY;

SILICON WAFERS;

EID: 84858638899     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.907972     Document Type: Conference Paper

References (16)

1. Tull B.R., Carey J.E., Mazur E., et.al "Silicon surface morphologies after femtosecond laser irradiation, " MRS Bulletin, 31, 626-633 (2006). (Pubitemid 44324664)
2. Dobrzanski L.A., Drygała A. "Surface texturing of multicrystalline silicon solar cells, " Journal of Achievements in Materials and Manufacturing Engineering, 31-1, 77-82 (2008).
3. Koynov S., Brandt M.S., Stutzmann M. "Black multi-crystalline silicon solar cells, " Physica Status Solidi RRL, Wiley: Weinheim, 53-55; DOI: 10.1002/pssr.200600064 (2007). (Pubitemid 351175967)
4. Dehghanpour H.R., Parvin P., Sajad B., Nour-Azar S.S. "Dose and pressure dependence of silicon microstructure in SF6 gas due to excimer laser irradiation, " Applied Surface Science, 255; 4664-4669 (2009).
5. Carey J.E. III. "Femtosecond-laser Microstructuring of Silicon for Novel Optoelectronic Devices, " PhD-Thesis, Harvard University Cambridge (2004).
6. Tull B.R. "Femtosecond Laser Ablation of Silicon: Nanoparticles, Doping and Photovoltaics, " PhD-Thesis, Harvard University Cambridge (2007).
7. Shockley W., Queisser H.J. "Detailed Balance Limit of Efficiency of p-n Junction Solar Cells, " Journal of Applied Physics, 32; 510; DOI: 10.1063/1.1736034 (1961).
8. Chichkov, B.N, et al., "Femtosecond, picosecond and nanosecond laser ablation of solids, " Journal of Applied Physics A 63, 109-115, (1996).
9. Dausinger, F., Hügel, H., Konov, V., "Micro-machining with ultrashort laser pulses: From basic understanding to technical applications, " Advanced Laser Technologies, Adelboden, Switzerland (2002).
10. Haupt O., Schütz V., Kling R., et al. "Improved laser edge isolation of crystalline silicon solar cells using a high power picosecond laser, " Proc. 28th ICALEO, M903, USA, Orlando (2009).
11. Siegel F., Schütz V., Stute U., Kling R. "LARGE-SCALE RIBLET SURFACES USING MULTI-SPOT MICRO MACHINING, " Proc. 29th ICALEO, M305; Anaheim, USA (2010).
12. Siegel F., Haupt O., Kling R. "HIGH THROUGHPUT MICRO MACHINING DUE TO PARALLEL LASER PROCESSING, " Proc. 4th PICALO; M604; Wuhan, China (2010).
13. Haupt O., Schütz V., and Stute U. "Multi-spot laser processing of crystalline solar cells, " Proc. SPIE 7921, 79210V, doi:10.1117/12. 876102(2011).
14. Schoonderbeek A., Schütz V., Haupt O., Stute U. "Laser processing of thin films for photovoltaic applications, " JLMN Vol.5, No.3, DOI:10.2961/jlmn.2010.03.0013 (2010).
15. N.N. "Datasheet Picosecond Innoslab Lasers Qx-Series, " www.edge-wave.com (2011).
16. Schütz V., Stute U., Overmeyer L., "Investigations on repetition rate and laser wavelength for efficient black silicon solar cells, " planned to be published in Progress in Photovoltaics.