Measurement of the anisotropy of young's modulus in single-crystal silicon

Journal of Microelectromechanical Systems

Volumn 21, Issue 1, 2012, Pages 243-249

  Boyd, Euan J ^a   Uttamchandani, Deepak ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

Anisotropy; elastic modulus; elasticity; micro electromechanical systems (MEMS); Young's modulus

Indexed keywords

[110] DIRECTION; ANGULAR DEPENDENCE; ELECTROMECHANICAL SYSTEMS; MEMS-STRUCTURE; MICRO-CANTILEVERS; PRINCIPAL AXIS; RESONANCE FREQUENCIES; SILICON ON INSULATOR WAFERS; SINGLE CRYSTAL SILICON; STRUCTURAL LAYERS; TEST STRUCTURE; THEORETICAL CALCULATIONS; THEORETICAL VALUES; WAFER SURFACE; YOUNG'S MODULUS;

ANISOTROPY; CRYSTAL ORIENTATION; ELASTIC MODULI; ELASTICITY; ELECTROMECHANICAL DEVICES; MEMS;

SILICON WAFERS;

EID: 84858444205     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2174415     Document Type: Article

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