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Diamond and Related Materials

Volumn 23, Issue , 2012, Pages 140-143

Investigation of nano structures on ta-C films made by gallium FIB lithography

(2) Philipp, P a Bischoff, L a

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

Focussed ion beam; Graphitisation; Nano structures; Tetrahedral amorphous carbon; van der Pauw

Indexed keywords

CARBON ATOMS; FIB LITHOGRAPHY; FLUENCES; FOCUSSED ION BEAMS; GRAPHITIC LAYERS; GRAPHITISATION; ION FLUENCES; LITHOGRAPHY PROCESS; LOWEST R; NANO SCALE; SUBSTRATE TEMPERATURE; TA-C FILM; TETRAHEDRAL AMORPHOUS CARBON; TETRAHEDRAL AMORPHOUS CARBON (TA-C); VAN-DER-PAUW;

ION BEAMS; NANOSTRUCTURES; PHOTOLITHOGRAPHY; RAPID THERMAL ANNEALING;

GALLIUM ALLOYS;

EID: 84858296998 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2012.01.025 Document Type: Article

Times cited : (4)

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