Fabrication and characterization of low temperature acetone sensor using CuO nanowires

Nanoscience and Nanotechnology Letters

Volumn 3, Issue 6, 2011, Pages 744-748

  Pandya, H J ^a   Chandra, Sudhir ^a   Vyas, A L ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Copper films; Copper oxide nanowires; RF magnetron sputtering; X ray diffraction

Indexed keywords

ACETONE SENSOR; ACETONE VAPORS; COPPER FILMS; FAST RESPONSE; HIGH SENSITIVITY; LARGE-AREA SUBSTRATES; LOW TEMPERATURES; MASK PROCESS; OPERATING TEMPERATURE; OXIDIZED SILICON SUBSTRATES; POLYCRYSTALLINE; RECOVERY TIME; RF MAGNETRON SPUTTERING; RF-SPUTTERING; SEED LAYER; SENSING ELEMENTS; SENSING FILMS; SENSOR FABRICATION;

ACETONE; DYNAMIC RESPONSE; ETHANOL; FABRICATION; MAGNETRON SPUTTERING; METALLIC FILMS; METHANOL; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SENSORS; SILICON OXIDES; SUBSTRATES; TEMPERATURE; VAPORS; VOLATILE ORGANIC COMPOUNDS; X RAY DIFFRACTION;

NANOWIRES;

EID: 84857256313     PISSN: 19414900     EISSN: 19414919     Source Type: Journal    
DOI: 10.1166/nnl.2011.1269     Document Type: Conference Paper

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