Structural, optical and sensing properties of Cr-doped TiO 2 thin films

Sensor Letters

Volumn 9, Issue 5, 2011, Pages 1697-1703

  Hajjaji, A ^a,b   Labidi, A ^c   Gaidi, M ^a   Ben Rabha, M ^a   Smirani, R ^b   Bejaoui, A ^c   Bessais, B ^a   El Khakani, M A ^b  

^a RESEARCH AND TECHNOLOGY CENTER OF ENERGY   (Tunisia)

^b INRS EMT   (Canada)

^c UNIVERSITÉ DE CARTHAGE   (Tunisia)

Author keywords

Bandgap; Chromium; Ethanol sensing; RF sputtering; TiO 2

Indexed keywords

CR CONTENT; CR-DOPED; CR-DOPING; DEPOSITED FILMS; DOPED-TIO; DOPING CONTENT; ENERGY BANDGAPS; ETHANOL SENSING; GAS SENSING DEVICES; OXIDIZED SILICON; P-TYPE CONDUCTION; RECOVERY TIME; RF MAGNETRON SPUTTERING METHOD; RF-SPUTTERING; ROOM TEMPERATURE; SENSING PROPERTY; SENSOR RESPONSE; TIO; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

ATOMIC FORCE MICROSCOPY; CHROMIUM; CONDUCTIVE FILMS; ENERGY GAP; ETHANOL; LANTHANUM COMPOUNDS; MAGNETRON SPUTTERING; OPTICAL CONSTANTS; SEMICONDUCTOR DOPING; SENSORS; SILICON OXIDES; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TITANIUM DIOXIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 84856986456     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2011.1736     Document Type: Article

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