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M) of the metal catalyst layer was extrapolated by considering a deposition rate of about 0.005 nm/pulse, as deduced using a quartz crystal microbalance and confirmed by cross-sectional SEM measurement on 200 nm-thick Pt and Au layers.
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note
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Our recent X-ray diffraction (XRD) investigations of Pt and Au layers showed that the size of the deposited nanoparticles remain stable even upon annealing up to 250 °C. Consequently, the operation of the sensors at 200 °C should not affect the nanostructural characteristics of the catalyst nanoparticles.
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