3 DOF scanning probe using parallel link mechanism

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

Volumn 1, Issue , 2008, Pages 189-192

  Harada, T ^a   Adachi, N ^a  

^a KINKI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; PRECISION ENGINEERING;

ADVANCED CONTROL ALGORITHMS; DISTURBANCE OBSERVER; FORCE SENSITIVITY; MECHANICAL IMPEDANCES; PARALLEL KINEMATIC MECHANISMS; POSITIONAL MEASUREMENTS; SCANNING PROBES; VOICE COIL MOTORS;

SCANNING;

EID: 84856187490     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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