Backscattered electron detection in environmental SEM

Journal of Microscopy

Volumn 245, Issue 2, 2012, Pages 171-185

  Danilatos, G D ^a  

^a ESEM Research Laboratory   (Australia)

Author keywords

Backscattered electron detection; BSE; BSE detection efficiency; ESEM; Light pipe; NE102A; Optimum BSE detector; SNR; YAG; YAP

Indexed keywords

ALUMINUM; BACKSCATTERING; EFFICIENCY; ELECTRONS; OPTICAL FIBERS; PEROVSKITE; PHOTOMULTIPLIERS; SCANNING ELECTRON MICROSCOPY; SCINTILLATION COUNTERS; YTTRIUM;

BACKSCATTERED ELECTRON DETECTION; BACKSCATTERED ELECTRONS; BSE; BSE DETECTION EFFICIENCY; DETECTION EFFICIENCY; ELECTRON DETECTION; ESEM; NE102A; OPTIMUM BSE DETECTOR; SNR; YAG; YAP;

YTTRIUM ALUMINUM GARNET;

ALUMINUM; CERIUM; PEROVSKITE; PLASTIC; YTTRIUM;

ARTICLE; ATTENTION; CONTROLLED STUDY; ENVIRONMENTAL ASPECTS AND RELATED PHENOMENA; GEOMETRY; LIGHT; PRIORITY JOURNAL; RADIATION DETECTOR; SCANNING ELECTRON MICROSCOPE; SCINTILLATION;

EID: 84855780081     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2011.03559.x     Document Type: Article

References (36)

1. Arnoult, C., Martino, J., Khouchaf, L., Toniazzo, V. & Ruch, D. (2011) Pressure and scattering regime influence on the EDS profile resolution at a composite interface in environmental SEM. Micron 42(8), 877-883.
2. Autrata, R. (1984) A double detector system for BSE and SE imaging. Scanning 6, 174-182.
3. Autrata, R., Schauer, P., Kvapil, J. & Kvapil, J. (1983a) Single-crystal aluminates - a new generation of scintillators for scanning electron microscopes and transparent screens in electron optical devices. Scan. Electron Microsc. II, 489-500.
4. Autrata, R., Schauer, P., Kvapil, J. & Kvapil, J. (1983b) A single crystal of YAlO3:Ce3+) as a fast scintillator in SEM. Scanning 5, 91-96.
5. Baumann, W. & Reimer, L. (1981) Comparison of the noise of different detection systems using a scintillator-photomultiplier combination. Scanning 4, 141-151.
6. Bolon, R., Roberstson, C.D. & Lifshin, E. (1989) The environmental SEM: a new way to look at insulators. In Microbeam Anal., (ed. by P.E. Russel ), pp. 449-452, San Francisco Press, San Francisco, U.S.A
7. Danilatos, G.D. (1981) Design and construction of an atmospheric or environmental SEM (part 1). Scanning 4, 9-20.
8. Danilatos, G.D. (1983a) Gaseous detector device for an environmental electron probe microanalyzer. Research Disclosure No. 23311, p. 284, Kenneth Mason Publications Ltd., Westbourne, Hants, U.K.
9. Danilatos, G.D. (1983b) A gaseous detector device for an environmental SEM. Micron. Microsc. Acta 14, 307-319.
10. Danilatos, G.D. (1985) Design and construction of an atmospheric or environmental SEM (part 3). Scanning 7, 26-42.
11. Danilatos, G.D. (1986a) Cathodoluminescence and gaseous scintillation in the environmental SEM. Scanning 8, 279-284.
12. Danilatos, G.D. (1986b) Colour micrographs for backscattered electron signals in the SEM. Scanning 8, 9-18.
13. Danilatos, G.D. (1986c) Environmental scanning electron microscopy in colour. J. Microsc. 142, 317-325.
14. Danilatos, G.D. (1986d) ESEM - A multipurpose surface electron microscope. Proc. 44th Annual Meeting EMSA. (ed. by G. Bailey ), pp. 632-633. San Francisco Press, San Francisco, California
15. Danilatos, G.D. (1988) Foundations of environmental scanning electron microscopy. Advances in Electronics and Electron Physics, vol. 71, pp. 109-250.
16. Danilatos, G.D. (1990) Theory of the Gaseous Detector Device in the ESEM. Advances in Electronics and Electron Physics, vol. 78, pp. 1-102.
17. Danilatos, G.D. (1993a) Environmental scanning electron microscope-some critical issues. Scanning Microsc. Int., Suppl. 7, 57-80.
18. Danilatos, G.D. (1993b) Introduction to ESEM instrument. Microsc. Res. Tech. 25, 354-361.
19. Danilatos, G.D. (2004) Environmental scanning electron microscope. United States Patent 6809322. United States Patent and Trademark Office U.S.A.
20. Danilatos, G.D. (2009) Optimum beam transfer in the environmental scanning electron microscope. J. Microsc. 234, 26-37.
21. Danilatos, G.D. (2011a) Figure of merit for environmental SEM and its implications. J. Microsc. 241, 159-169.
22. Danilatos, G.D. (2011b) Velocity and ejector-jet assisted differential pumping: novel design stages for environmental SEM. Micron. in press.
23. Danilatos, G.D. & Postle, R. (1982) The environmental scanning electron microscope and its applications. Scan. Electron Microsc. 1982, 1-16.
24. Danilatos, G.D. & Robinson, V. (1979) Principles of scanning electron microscopy at high specimen pressures. Scanning 2, 72-82.
25. Danilatos, G.D., Rattenberger, J. & Dracopoulos, V. (2011) Beam transfer characteristics of a commercial environmental SEM and a low vacuum SEM. J. Microsc. 242, 166-180.
26. Hatzakis, M. (1970) A new method of forming scintillators for electron collectors. Rev. Sci. Instrum. 41, 128.
27. Joy, D.C., Joy, C.S. & Dunn, R.D. (1996) Measuring the performance of scanning electron microscope detectors. Scanning 18, 533-538.
28. Nedela, V. (2009) Controlled dehydration of a biological sample using an alternative form of environmental SEM. J. Microsc. 237, 7-11.
29. Oatley, C. (1985) The detective quantum efficiency of the scintillator/photomultiplier in the scanning electron microscope. J. Microsc. 139, 153-166.
30. Reimer, L. (1985) Scanning Electron Microscopy. Springer-Verlag, Berlin.
31. Robinson, V. (1974) A wet stage modification to a scanning electron microscope. In 8th Int. Congr. El. Microsc. (ed. by J. Sanders & D. Goodchild ), vol. II, pp. 50-51. Australian Academy of Science, Canberra, Australia
32. Robinson, V.N.E. (1980) Electron microscope backscattered electron detectors. US patent 4217495, US Patent and Trademark Office, U.S.A.
33. Schauer, P. (2007) Extended algorithm for simulation of light transport in single crystal scintillation detectors for S(T)EM. Scanning 29, 249-253.
34. Schauer, P. & Autrata, R. (1979) Electro-optical properties of a scintillation detector in SEM. J. Microsc. Spectrosc. Electron 4, 633-650.
35. Schauer, P. & Autrata, R. (1992) Light transport in single-crystal scintillation detectors in SEM. Scanning 14, 325-333.
36. Wells, O. (1974) Scanning Electron Microscopy. McGraw-Hill Book Company, New York.