Figure of merit for environmental SEM and its implications

Journal of Microscopy

Volumn 244, Issue 2, 2011, Pages 159-169

  Danilatos, G D ^a  

^a ESEM Research Laboratory   (Australia)

Author keywords

Beam loss; Beam transfer; BGPL; Environmental SEM; Epsilon; ESEM; FEI Quanta 600 FEG; Figure of merit; Gas thickness; Leak rate; PLA bullet; VP ESEM

Indexed keywords

SCANNING ELECTRON MICROSCOPY;

BEAM LOSS; BEAM TRANSFER; BGPL; ENVIRONMENTAL SEM; EPSILON; ESEM; FEI QUANTUM 600 FEG; FIGURE OF MERIT; GAS THICKNESS; LEAK RATE; PLA BULLET; VP-ESEM;

MONTE CARLO METHODS;

ARTICLE; ELECTRON TRANSPORT; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE; MEASUREMENT; MONTE CARLO METHOD; PRESSURE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; VACUUM;

EID: 80054678804     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2011.03521.x     Document Type: Article

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