Beam transfer characteristics of a commercial environmental SEM and a low vacuum SEM

Journal of Microscopy

Volumn 242, Issue 2, 2011, Pages 166-180

  Danilatos, G ^a   Rattenberger, J ^b   Dracopoulos, V ^c  

^a ESEM Research Laboratory   (Australia)

^b GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^c INSTITUTE OF CHEMICAL ENGINEERING SCIENCES   (Greece)

Author keywords

Beam loss; Beam transmission; ESEM; Figure of merit; LVSEM; Mass thickness; Particle thickness; Stagnation gas thickness; Transmission efficiency

Indexed keywords

ELECTRONS; FLOW OF GASES; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY;

BEAM LOSS; BEAM TRANSMISSION; ESEM; FIGURE OF MERIT; LVSEM; MASS THICKNESS; PARTICLE THICKNESS; STAGNATION GAS THICKNESS; TRANSFER CHARACTERISTICS; TRANSMISSION EFFICIENCY;

DENSITY OF GASES;

ARTICLE; ELECTRON BEAM; GAS FLOW; MONTE CARLO METHOD; PRESSURE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; TEMPERATURE SENSITIVITY; VACUUM; VELOCITY; WATER VAPOR;

EID: 79953311118     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2010.03455.x     Document Type: Article

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