Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

Materials Research Society Symposium Proceedings

Volumn 1352, Issue , 2012, Pages 81-87

  Petrik, P ^a   Egger, H ^b   Eiden, S ^b   Agocs, E ^a,c   Fried, M ^a   Pecz, B ^a   Kolari, K ^d   Aalto, T ^d   Horvath, R ^a   Giannone, D ^e  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BAYER AG   (Germany)

^c UNIVERSITY OF PANNONIA   (Hungary)

^d VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^e Multitel   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-CHEMICAL SENSOR; CRITICAL PARAMETER; EXTINCTION COEFFICIENTS; HIGH REFRACTIVE INDEX; INTERFACE PROPERTY; LAYER THICKNESS; OPTICAL DENSITIES; OPTICAL MODELS; OPTICAL PARAMETER; OPTICAL QUALITY THIN FILMS; PREPARATION CONDITIONS; TIO; WAVE-GUIDING; WAVEGUIDE SENSORS; WAVELENGTH RANGES;

NANOCOMPOSITE FILMS; POLYMER FILMS; REFRACTIVE INDEX; SENSORS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS; TITANIUM; TITANIUM DIOXIDE; WAVEGUIDES;

OPTICAL FILMS;

EID: 84455190288     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2011.1342     Document Type: Conference Paper

References (12)

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