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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 29, Issue 6, 2011, Pages

3D nanostructures by stacking pre-patterned fluid-supported single-crystal Si membranes

(5) Ghadarghadr, Shabnam a Fucetola, Corey P a Lee Cheong, Lin a E Moon, Euclid a I Smith, Henry a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROFLUORIC ACID; LIQUIDS; PHOTONIC CRYSTALS; SILICON; THREE DIMENSIONAL;

3D PHOTONIC CRYSTALS; 3D STRUCTURE; DIMENSIONAL CONTROL; HYDROPHOBIC NATURE; IN-PLANE DISTORTIONS; INTRINSIC STRESS; LIQUID SURFACE; OXIDE SUBSTRATES; SINGLE-CRYSTAL SI; SUB-100 NM; THIN MEMBRANE; THREE DIMENSIONAL (3D) STRUCTURES;

MEMBRANES;

EID: 84255189825 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3628672 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.