Chemically amplified positive i-line photoresist containing iodonium salt PAG and dye sensitizers

Yingxiang Kexue yu Guanghuaxue/Imaging Science and Photochemistry

Volumn 29, Issue 6, 2011, Pages 430-437

  Liu, Juan ^a   Kong, Fan Rong ^a   Yu, Jin Xing ^a   Wang, Li Yuan ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Acetal polymer; Acidolysis; Dye; I line photoresist; PAG; Positive; Sensitizer

Indexed keywords

EID: 83755206051     PISSN: 16740475     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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4. Dektar J L, Hacker N P. Photochemistry of diaryliodonium salts[J]. J. Org. Chem., 1990, 55: 639-647.
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