CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler

IEEE Photonics Technology Letters

Volumn 24, Issue 1, 2012, Pages 10-12

  Zhang, Huijuan ^a   Zhang, Jing ^a   Chen, Shiyi ^a   Song, Junfeng ^a   Kee, Jack Sheng ^a   Yu, Mingbin ^a   Lo, Guo Qiang ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Channel slot coupler; complementary metal oxide semiconductor (CMOS) compatible; slot waveguide

Indexed keywords

CHANNEL-SLOT COUPLER; CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DEEP ULTRAVIOLET LITHOGRAPHY; LOW INSERTION LOSS; PROPAGATION LOSS; RESOLUTION LIMITS; SILICON-BASED; SLOT WAVEGUIDE; STRUCTURE-BASED; WAFER-SCALE;

DIELECTRIC DEVICES; METAL CUTTING; SILICON WAFERS;

WAVEGUIDES;

EID: 83455258018     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2011.2171936     Document Type: Article

References (21)

1. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure", Opt. Lett., vol. 29, pp. 1209-1211, 2004.
2. Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, "Experimental demonstration of guiding and confining light in nanometer-size lowrefractive-index material", Opt. Lett., vol. 29, pp. 1626-1628, 2004.
3. X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, "Simulation demonstration and experimental fabrication of multiple-slot waveguide", IEEE Photon. Technol. Lett., vol. 20, no. 5, pp. 333-335, Mar.1, 2008. (Pubitemid 351351592)
4. P. Müllner and R. Hainberger, "Structural optimization of silicon-oninsulator slot waveguides", IEEE Photon. Technol. Lett., vol. 18, no. 24, pp. 2557-2559, Dec.15, 2006. (Pubitemid 46002191)
5. C. A. Barrios and M. Lipson, "Electrically driven silicon resonant light emitting device based on slot-waveguide", Opt. Express, vol. 13, pp. 10092-10101, 2005. (Pubitemid 41785218)
6. R. Ding, T. Baehr-Jones, Y. Liu, R. Bojko, J. Witzens, S. Huang, J. Luo, S. Benight, P. Sullivan, J.-M. Fedeli, M. Fournier, L. Dalton, A. Jen, and M. Hochberg, "Demonstration of a low V π L modulator with GHz bandwidth based on electro-optic polymer-clad silicon slot waveguides", Opt. Express, vol. 18, pp. 15618-15623, 2010.
7. J. T. Robinson, L. Chen, and M. Lipson, "On-chip gas detection in silicon optical microcavities", Opt. Express, vol. 16, pp. 4296-4301, 2008. (Pubitemid 351434398)
8. T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, "Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator", IEEE Photon. J., vol. 1, no. 3, pp. 197-204, Sep. 2009.
9. T. Fujisawa and M. Koshiba, "Polarization-independent optical directional coupler based on slot waveguides", Opt. Lett., vol. 31, pp. 56-58, 2006. (Pubitemid 43133279)
10. Y. Yue, L. Zhang, J.-Y. Yang, R. G. Beausoleil, and A. E. Willner, "Silicon-on-insulator polarization splitter using two horizontally slotted waveguides", Opt. Lett., vol. 35, pp. 1364-1366, 2010.
11. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-optical resonators in silicon-on-insulator-based slot waveguides", Appl. Phys. Lett., vol. 86, pp. 081101-3, 2005.
12. J. Schrauwen, J. V. Lysebettens, T. Claes, K. De Vos, P. Bienstman, D. V. Thourhout, and R. Baets, "Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators", IEEE Photon. Technol. Lett., vol. 20, no. 23, pp. 2004-2006, Dec.1, 2008.
13. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends", Opt. Express, vol. 12, pp. 1622-1631, 2004.
14. S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. V. Thourhout, P. Dumon, and R. Baets, "Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography", J. Lightw. Technol., vol. 27, no. 18, pp. 4076-4083, Sep. 15, 2009.
15. R. Ding, T. Baehr-Jones, W.-J. Kim, B. Boyko, R. Bojko, A. Spott, A. Pomerene, C. Hill, W. Reinhardt, and M. Hochberg, "Low-loss asymmetric strip-loaded slot waveguides in silicon-on-insulator", Appl. Phys. Lett., vol. 98, p. 233303, 2011.
16. A. Spott, T. Baehr-Jones, R. Ding, Y. Liu, R. Bojko, T. O'Malley, A. Pomerene, C. Hill, W. Reinhardt, and M. Hochberg, "Photolithographically fabricated low-loss asymmetric silicon slot waveguides", Opt. Express, vol. 19, pp. 10950-10958, 2011.
17. N.-N. Feng, R. Sun, L. C. Kimerling, and J. Michel, "Lossless strip-toslot waveguide transformer", Opt. Lett., vol. 32, pp. 1250-1252, 2007.
18. J. Blasco and C. A. Barrios, "Compact slot-waveguide/channel- waveguide mode-converter", in Proc. Conf. Lasers and Electro-Optics Europe IEEE, 2005, p. 607.
19. F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip", Nature Photon., vol. 1, pp. 65-71, 2007.
20. A. Densmore, D.-X. Xu, S. Janz, P. Waldron, J. Lapointe, T. Mischki, G. Lopinski, A. Delâge, J. H. Schmid, and P. Cheben, "Sensitive labelfree biomolecular detection using thin silicon waveguides", Adv. Opt. Technol., vol. 2008, p. 725967, 2008.
21. S. Hui and G. H. Xu, "Fresnel-reflection-based fiber sensor for on-line measurement of solute concentration in solutions", Sens. Actuators B, vol. 126, pp. 579-582, 2007.