Simulation demonstration and experimental fabrication of a multiple-slot waveguide

IEEE Photonics Technology Letters

Volumn 20, Issue 5, 2008, Pages 333-335

  Tu, Xiaoguang ^a   Xu, Xuejun ^a   Chen, Shaowu ^a   Yu, Jinzhong ^a   Wang, Qiming ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Dielectric waveguides; Silicon on insulator technology

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC WAVEGUIDES; OPTICAL FIBER FABRICATION;

INDEX SLOT MATERIALS; MULTIPLE-SLOT WAVEGUIDE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 40449124420     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.915619     Document Type: Article

References (8)

1. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure,," Opt. Lett., vol. 29, p. 1209, 2004.
2. T. Fujisawa and M. Koshiba, "Polarization-independent optical directional coupler based on slot waveguides," Opt. Lett., vol. 31, p. 56, 2006.
3. T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q optical resonators in silicon-on-insulator-based slot waveguides," Appl. Phys. Lett., vol. 86, p. 081101, 2005.
4. T. Baehr-Jones, M. Hochberg, G. Wang, R. Lawson, Y. Liao, P. A. Sullivan, L. Dalton, A. K.-Y. Jen, and A. Scherer, "Optical modulation and detection in slotted silicon waveguides," Opt. Express, vol. 13, p. 5216, 2005.
5. C. A. Barrios and M. Lipson, "Electrically driven silicon resonant light emitting device based on slot-waveguide," Opt. Express, vol. 13, p. 10092, 2005.
6. Photon Design Software [Online]. Available: http://www.photond.com
7. S. Mani and M. Saif, "Mechanism of controlled crack formation in thin-film dielectrics," Appl. Phys. Lett., vol. 86, p. 201903, 2005.
8. M. Mazhar, I Raja, M. A. Cappelli, J. P. McVittie, and K. C. Saraswat, "A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias," J. Appl. Phys., vol. 70, p. 7137, 1991.