Embedded layer of Ag nanoparticles prepared by a combined PECVD/PVD process producing SiO xC y-Ag nanocomposite thin films

Nanotechnology

Volumn 23, Issue 1, 2012, Pages

  Bedel, Laurent ^a   Cayron, Cyril ^a   Jouve, Michel ^a   Maury, Francis ^b  

^a CEA GRENOBLE   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AG NANOPARTICLE; ANTIBACTERIAL PROPERTIES; AVERAGE SIZE; BURIED LAYER; DIELECTRIC MATRIXES; DISTRIBUTION DENSITY; DUAL PROCESS; EMBEDDED LAYERS; MATRIX; MULTIFUNCTIONAL PROPERTIES; NANOCOMPOSITE THIN FILMS; NANOSTRUCTURED FILMS; OUTER SURFACE; PLASMONIC; ROOM TEMPERATURE; SILVER DIFFUSION;

FILM PREPARATION; NANOCOMPOSITE FILMS; NANOCOMPOSITES; NANOPARTICLES; SILICON COMPOUNDS; THIN FILMS;

SILVER;

EID: 83455236015     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/1/015603     Document Type: Article

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