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Volumn 47, Issue 10, 2004, Pages 49-54
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Using tunable diode laser spectroscopy to detect trace moisture in ammonia
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Author keywords
[No Author keywords available]
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Indexed keywords
MOISTURE DETECTION;
PRESSURE STABILITY;
TUNABLE DIODE LASER SPECTROSCOPY (TDLAS);
ULTRAHIGH-PURITY GASES;
AMMONIA;
CONCENTRATION (PROCESS);
CONTAMINATION;
DIFFUSION IN GASES;
EPITAXIAL GROWTH;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDRIDES;
LIGHT EMITTING DIODES;
LUMINESCENCE;
MOISTURE;
VAPORIZATION;
SEMICONDUCTOR LASERS;
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EID: 8344270278
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Review |
Times cited : (3)
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References (11)
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