메뉴 건너뛰기




Volumn 22, Issue 4, 2004, Pages 47-55

Detecting single-digit parts-per-billion levels of moisture in ammonia gas

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION SYSTEMS; INSTRUMENTATION; MOISTURE ANALYZERS; NARROW BAND FILTERING;

EID: 2942621970     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (2)

References (7)
  • 1
    • 0347619767 scopus 로고    scopus 로고
    • Measurement of trace levels of moisture in UHP hydride gases by FTIR spectroscopy
    • S Salim and A Gupta, "Measurement of Trace Levels of Moisture in UHP Hydride Gases by FTIR Spectroscopy," Clean-rooms (1997): 28-30.
    • (1997) Clean-rooms , pp. 28-30
    • Salim, S.1    Gupta, A.2
  • 2
    • 0035516638 scopus 로고    scopus 로고
    • Impurities in hydride gases part 1: Investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopy
    • HH Funke et al., "Impurities in Hydride Gases Part 1: Investigation of Trace Moisture in the Liquid and Vapor Phase of Ultra-Pure Ammonia by FTIR Spectroscopy," Journal of Electronic Materials 30, no. 11 (2001): 1438-1447.
    • (2001) Journal of Electronic Materials , vol.30 , Issue.11 , pp. 1438-1447
    • Funke, H.H.1
  • 3
    • 77957581298 scopus 로고    scopus 로고
    • Trace impurity detection in ammonia for the compound semiconductor market
    • paper presented at the, Semicon West, San Francisco, July 17-21
    • GM Mitchell et al., "Trace Impurity Detection in Ammonia for the Compound Semiconductor Market" (paper presented at the SEMI Technical Symposium: Innovations in Semiconductor Manufacturing, Semicon West, San Francisco, July 17-21, 2002).
    • (2002) SEMI Technical Symposium: Innovations in Semiconductor Manufacturing
    • Mitchell, G.M.1
  • 4
    • 0032141588 scopus 로고    scopus 로고
    • 3 gases with dual-cell near-infrared diode laser absorption spectroscopy
    • 3 Gases with Dual-Cell Near-Infrared Diode Laser Absorption Spectroscopy," Analytical Chemistry 70, no. 15 (1998): 3315-3321.
    • (1998) Analytical Chemistry , vol.70 , Issue.15 , pp. 3315-3321
    • Wu, S.-Q.1
  • 5
    • 0019545681 scopus 로고
    • Two-mirror multipass absorption cell
    • J Altmann, R Baumgart, and C Weitkamp, "Two-Mirror Multipass Absorption Cell," Applied Optics 20, no. 6 (1981): 995-999.
    • (1981) Applied Optics , vol.20 , Issue.6 , pp. 995-999
    • Altmann, J.1    Baumgart, R.2    Weitkamp, C.3
  • 6
    • 84975633777 scopus 로고
    • Frequency-modulation spectroscopy for trace species detection: Theory and comparison among experimental methods
    • JA Silver, "Frequency-Modulation Spectroscopy for Trace Species Detection: Theory and Comparison Among Experimental Methods," Applied Optics 31, no. 6 (1992): 707-717.
    • (1992) Applied Optics , vol.31 , Issue.6 , pp. 707-717
    • Silver, J.A.1
  • 7
    • 84975608710 scopus 로고
    • Frequency modulation and wavelength modulation spectroscopies: Comparison of experimental methods using a lead-salt diode laser
    • DS Bomse, AC Stanton, and JA Silver, "Frequency Modulation and Wavelength Modulation Spectroscopies: Comparison of Experimental Methods Using a Lead-Salt Diode Laser," Applied Optics 31, no. 6 (1992): 718-731.
    • (1992) Applied Optics , vol.31 , Issue.6 , pp. 718-731
    • Bomse, D.S.1    Stanton, A.C.2    Silver, J.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.