Getter stabilized zeolite materials for specialty gas purification

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1997, Pages 262-269

  Vergani, G ^a   Succi, M ^a   Thrush, E J ^a   Crawley, J A ^a   Van der Stricht, W ^a   Torres, P ^a   Kroll, U ^a  

^a SAES GETTERS S P A   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; GALLIUM COMPOUNDS; GETTERS; OXYGEN; PURIFICATION; THERMAL EFFECTS; ZEOLITES;

MICROCYSTALLINE POLYSILICON LAYERS; SPECIALTY GAS PURIFICATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031365575     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)