Toxic gases detection by NiO sputtered thin films

Sensor Letters

Volumn 9, Issue 1, 2011, Pages 64-68

  Castro Hurtado, I ^a   Herran J ^a   Perez N ^a   Olaizola, S M ^a   Mandayo, G Ga ^a   Castano E ^a  

^a CEIT   (Spain)

Author keywords

Gas Sensor; NiO thin films; NO2 Detection; Toxic gases

Indexed keywords

ALUMINA SUBSTRATES; BEST RESPONSE; ELECTRICAL RESPONSE; HUMAN BODIES; INTERDIGITATED MICROELECTRODES; LOW CONCENTRATIONS; MATERIAL MICROSTRUCTURES; MORPHOLOGICAL CHARACTERIZATION; NIO THIN FILM; REVERSE SIDE; RF REACTIVE MAGNETRON SPUTTERING; SENSING FILMS; SPUTTERED THIN FILMS; XRD;

ALUMINA; CHEMICAL SENSORS; ENERGY DISPERSIVE SPECTROSCOPY; MICROELECTRODES; NITROGEN OXIDES; PLATINUM; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TOXIC MATERIALS; VACUUM TECHNOLOGY;

GASES;

EID: 83255181467     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2011.1420     Document Type: Conference Paper

References (10)

1. J. A. Dirksen, K. Duval, and T. A. Ring, Sens. Actuators. B 80, 106 (2001).
2. C.-Y. Lee, C.-M. Chiang, Y.-H. Wang, and R.-H. Ma, Sens. Actuators. B 122, 503 (2007).
3. I. Hotovoy, V. Rehacek, P. Siciliano, S. Capone, and L. Spiess, Thin Solid Films 418, 9 (2002).
4. http://www.cdc.gov/NIOSH/.
5. Y. M. Lu, W. S. Hwang, J. S. Yang, and H. C. Chuang, Thins Solid Films 421, 54 (2002).
6. K. K. Purushothaman and G. Muralidharan, Sol. Energ. Mat. Sol. Cells 93, 1195 (2009).
7. H.-L. Chen, Y.-M. Lu, and W.-S. Hwang, Thin Solid Films 514, 361 (2006).
8. C. Luyo, R. Ionescu, L. F. Reyes, Z. Topalian, W. Estrada, E. Llobet, C. G. Granqvist, and P. Heszler, Sens. Actuators. B 138, 14 (2009).
9. Korotcenkov and B. K. Cho, Sens. Actuators. B 142, 321 (2009).
10. V. V. Plashnitsa, P. Elumalai, Y. Fujio, and N. Miura, Electrochim. Acta 54. 6099 (2009).