Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Materials Letters

Volumn 68, Issue , 2012, Pages 507-509

  Goel, Saurav ^a   Luo, Xichun ^a   Reuben, Robert L ^a   Rashid, Waleed Bin ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

CBN; High pressure phase transformation (HPPT); Nanometric cutting; Silicon

Indexed keywords

CBN; CBN TOOLS; CUBIC BORON NITRIDE (CBN); CUBIC LATTICE; CUTTING ZONE; DIAMOND TOOL; DUCTILE REGIME; FCC LATTICE STRUCTURE; HIGH PRESSURE PHASE TRANSFORMATION (HPPT); HIGH PRESSURE PHASE TRANSFORMATIONS; MOLECULAR DYNAMICS SIMULATIONS; NANOMETRIC CUTTING; SINGLE CRYSTAL SILICON; TOOL MATERIALS;

BORON; CERAMIC TOOLS; CRYSTAL CUTTING; CUBIC BORON NITRIDE; DIAMONDS; HIGH PRESSURE ENGINEERING; MOLECULAR DYNAMICS; PHASE TRANSITIONS; PRECISION ENGINEERING; SILICON; SILICON WAFERS; SINGLE CRYSTALS;

DIAMOND CUTTING TOOLS;

EID: 83055168376     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2011.11.028     Document Type: Article

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