Selective removal of transparent conductive oxide layers with ultrashort laser pulses: Front-vs. Back-side ablation

30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011

Volumn , Issue , 2011, Pages 1022-1027

  Matylitsky, Victor V ^a   Huber, Heinz ^a   Kopf, Daniel ^a  

^a High Q Laser Innovation GmbH   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; COATED MATERIALS; FILM THICKNESS; II-VI SEMICONDUCTORS; PULSE REPETITION RATE; SOLAR POWER GENERATION; SUBSTRATES; THIN FILM SOLAR CELLS; THIN FILMS; ULTRAFAST LASERS; ULTRASHORT PULSES; ZINC OXIDE;

COST OF MANUFACTURING; GALVANIC SEPARATIONS; HIGH REPETITION RATE; MATERIAL PROCESSING APPLICATIONS; PHOTOVOLTAIC GENERATION; SELECTIVE ABLATIONS; STRONG DEPENDENCES; TRANSPARENT CONDUCTIVE OXIDES;

LASER MATERIALS PROCESSING;

EID: 82655170792     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5062174     Document Type: Conference Paper

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