Directly induced ablation of metal thin films by ultrashort laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7925, Issue , 2011, Pages

  Heise, Gerhard ^a   Konrad, Jan ^a   Sarrach, Sebastian ^a   Sotrop, Jürgen ^a   Huber, Heinz P ^a  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

laser ablation; laser scribing; laser structuring; picosecond laser; Thin film; ultrafast laser

Indexed keywords

ABLATION EFFICIENCY; ABLATION MECHANISMS; FLUENCES; GLASS SIDE; GLASS SUBSTRATES; INTERMEDIATE BUFFERS; LASER SCRIBING; LASER STRUCTURING; METAL THIN FILM; MOLYBDENUM FILMS; PICOSECOND LASER; PICOSECOND LASER PULSE; STRUCTURAL QUALITIES; ULTRA-FAST; ULTRASHORT LASER PULSE;

CHROMIUM; GLASS; INDUSTRIAL APPLICATIONS; LASER ABLATION; LASER APPLICATIONS; LASER PULSES; MOLYBDENUM; PLATINUM; PULSE GENERATORS; SUBSTRATES; THIN FILMS; TITANIUM; ULTRAFAST LASERS; ULTRAFAST PHENOMENA;

GLASS LASERS;

EID: 79953907295     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.876451     Document Type: Conference Paper

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