Formation of Si wells and pyramids on (1 0 0) surface as a result of ZnSi interaction

Materials Science in Semiconductor Processing

Volumn 14, Issue 3-4, 2011, Pages 302-305

  Wu, Yue ^a   Zhang, Gengmin ^b   Xi, Zhonghe ^b  

^a PEKING UNIVERSITY   (China)

^b PEKING UNIVERSITY   (China)

Author keywords

Eutectics; Pyramid; Silicon; Well; Zinc

Indexed keywords

MODERATELY HIGH TEMPERATURE; PYRAMID; SI ATOMS; SI WAFER; SI WELLS; WAFER SURFACE; ZN ATOMS;

ATOMS; DROPS; EUTECTICS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; WELLS; ZINC;

SILICON WAFERS;

EID: 82455212093     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2011.02.008     Document Type: Article

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