Sensitivity of a vanadium oxide uncooled microbolometer array for terahertz imaging

Optical Engineering

Volumn 50, Issue 5, 2011, Pages

  Coppinger, Matthew ^a   Sustersic, Nathan A ^a   Kolodzey, James ^a   Allik, Toomas H ^b  

^a UNIVERSITY OF DELAWARE   (United States)

^b Active EO Inc   (United States)

Author keywords

microbolometer; noise equivalent differential temperature; noise equivalent power; terahertz imaging; vanadium oxide

Indexed keywords

BLACK BODY RADIATOR; BLACKBODY TEMPERATURES; BROADBAND IMAGING; BROADBAND TERAHERTZ; DETECTOR COMPONENTS; FAR-INFRARED; FIGURES OF MERITS; INCIDENT RADIATION; MICROBOLOMETER; MICROBOLOMETER ARRAYS; NOISE EQUIVALENT POWER; OPTICAL COMPONENTS; OPTICAL CONFIGURATIONS; OPTICAL FILTERING; RADIANT FLUX; RELATIVE UTILITY; TERA HERTZ; TERAHERTZ IMAGING; TERAHERTZ IMAGING SYSTEMS; TRANSMISSION PROPERTY; UNCOOLED MICROBOLOMETERS; VANADIUM OXIDE; VANADIUM OXIDES;

BOLOMETERS; CAMERAS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; OXIDES; TEMPERATURE SENSORS; VANADIUM; VANADIUM COMPOUNDS;

TERAHERTZ WAVES;

EID: 81755173012     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3574066     Document Type: Article

References (26)

1. C. Baker, W. R. Tribe, T. Lo, B. E. Cole, S. Chandler, and M. C. Kemp, "People screening using terahertz technology," Proc. SPIE. 5790, 1-10 (2005).
2. D. L. Woolard, E. R. Brown, M. Pepper, and M. Kemp, "Terahertz frequency sensing and imaging: A time of reckoning future applications?" Proc IEEE 93, 1722-1743 (2005).
3. D. L. Woolard, E. R. Brown, A. C. Samuels, J. O. Jensen, T. Globus, B. Gelmont, and M. Wolski, "Terahertz-frequency remote-sensing of biological warfare agents," in 2003 IEEE MTT-S International Microwave Symposium Digest, IEEE, Philadelphia, PA, pp. 763-766 (2003).
4. R. M. Woodward, B. E. Cole, V. P. Wallace, R. J. Pye, D. D. Arnone, E. H. Linfield, and M. Pepper, "Terahertz pulse imaging in reflection geometry of human skin cancer and skin tissue," Phys. Med. Biol. 47, 3853-3863 (2002).
5. D. Crawley, C. Longbottom, V. P. Wallace, B. Cole, D. Arnone, and P. Michael, "Three-dimensional terahertz pulse imaging of dental tissue," J. Biomed. Opt. 8, 303-307 (2003).
6. Y. Shen, P. F. Taday, and M. C. Kemp, "Terahertz spectroscopy of explosive materials," Proc. SPIE. 5619, 82-89 (2004).
7. G. Xuan, S. Kim, M. Coppinger, N. Sustersic, J. Kolodzey, and P. Lv, "Increasing the operating temperature of boron doped silicon terahertz electroluminescence devices," Appl. Phys. Lett. 91, 061109-1-061109-3 (2007).
8. G. Xuan, P. Lv, X. Zhang, J. Kolodzey, G. Desalvo, and A. Powell, "Silicon carbide terahertz emitting devices," J. Electron. Mater. 37, 726-729 (2008).
9. A. W. M. Lee and Q. Hu, "Real-time, continuous-wave terahertz imaging by use of a microbolometer focal-plane array," Opt. Lett. 30, 2563-2565 (2005).
10. E. Grossman, C. Dietlein, J. Bjarnason, A. Luukanen, M. Leivo, and J. Pentilla, "THz microbolometers for imaging applications," in 33rd International Conference on Infrared and Millimeter Waves and the 16th International Conference on Terahertz Electronics, IRMMW-THz, IEEE, Pasadena, CA (2008).
11. B. N. Behnken, G. Karunasiri, D. R. Chamberlin, P. R. Robrish, and J. Faist, "Real-time imaging using a 2.8 THz quantum cascade laser and uncooled infrared microbolometer camera," Opt. Lett. 33, 440-442 (2008).
12. L. Marchese, M. Bolduc, B. Tremblay, M. Doucet, H. Oulachgar, L. Le Noc, F. Williamson, C. Alain, H. Jerominek, and A. Bergeron, "A microbolometer-based THz imager," Proc. SPIE 7671, 76710Z-1-76710Z-8 (2010).
13. N. Oda, "Uncooled bolometer-type Terahertz focal plane array and camera for real-time imaging." C. R. Phys. 11, 7-8 (2010).
14. G. C. Holst, Testing and Evaluation of Infrared Imaging Systems, JCD Publishers, Winter Park, FL (2008).
15. A.W. M. Lee, B. S.Williams, S. Kumar, Q. Hu, and J. L. Reno, "Realtime imaging using a 4.3-THz quantum cascade laser and a 320 240 microbolometer focal-plane array," IEEE Photonics Technol. Lett. 18, 1415-1417 (2006).
16. N. Oda, H. Yoneyama, T. Sasaki, M. Sano, S. Kurashina, I. Hosako, N. Sekine, T. Sudoh, and T. Irie, "Detection of terahertz radiation from quantum cascade laser using vanadium oxide microbolometer focal plane arrays," Proc. SPIE 6940, 69402-1 (2008).
17. R. G. Driggers, C. E. Halford, G. D. Boreman, and M. R. Wellfare, "Comparison of two frame noise calculations for infrared linescanners," Opt. Eng. 29, 781-785 (1990).
18. K. Chrzanowski, "Evaluation of commercial thermal cameras in quality systems," Opt. Eng. 41, 2556-2567 (2002).
19. Indigo Systems Corp. "Micron OEM Core data sheet," http://www.corebyindigo.com/PDF/TVMicron.pdf, 2006.
20. S. Chen, H. Ma, S. Xiang, and X. Yi, "Fabrication and performance of microbolometer arrays based on nanostructured vanadium oxide thin films," Smart Mater. Struct. 16, 696-700 (2007).
21. Y. Han, I. Choi, H. Kang, J. Park, K. Kim, H. Shin, and S. Moon, "Fabrication of vanadium oxide thin film with hightemperature coefficient of resistance using V2O5/V/V2O5 multilayers for uncooled microbolometers," Thin Solid Films 425, 260-264 (2003).
22. W. A. Radford, D. F. Murphy, A. Finch, A. Kennedy, J. K. Kojiro, M. Ray, R.Wyles, R. Coda, E. A.Moody, and S. T. Baur, "Microbolometer uncooled infrared camera with 20 mK NETD," Proc. SPIE 3379, 22-35 (1998).
23. J. Nemarich, "Microbolometer detectors for passive millimeter-wave imaging," Army Research Laboratory (2005).
24. J. Wei, D. Olaya, S. V. Pereverzev, M. E. Gershenson, B. S. Karasik, and A. V. Sergeev, "Ultrasensitive hot-electron nanobolometers for terahertz astrophysics," Nat. Nanotechnol. 3, 496-500 (2008).
25. F. Sizov and A. Rogalski, "THz detectors," Prog. Quantum Electron. 34, 278-347 (2010).
26. T. Maier and H. Bruckl, "Wavelength-tunable microbolometers with metamaterial absorbers," Opt. Lett. 34, 3012-3014, 2009.