Design and fabrication of a multi-axis MEMS force sensor with integrated carbon nanotube based piezoresistors

Technical Proceedings of the 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011

Volumn 2, Issue , 2011, Pages 302-305

  Cullinan, Michael A ^a   Panas, Robert M ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

Carbon nanotube; Force sensor; HexFlex; MEMS; Piezoresistor

Indexed keywords

DYNAMIC RANGE; FORCE SENSOR; HEXFLEX; HIGH STRAINS; MEMS FORCES; MULTI-AXIS; NANOSCALE SENSORS; ORDERS OF MAGNITUDE; PIEZO-RESISTORS; PIEZORESISTIVE SENSORS; PIEZORESISTOR; SENSING TECHNOLOGY; SENSOR DESIGNS; SMALL SIZE; STRAIN SENSORS;

CARBON; CARBON NANOTUBES; DESIGN; FABRICATION; FLUIDICS; MEMS; NANOTECHNOLOGY;

SENSORS;

EID: 81455144665     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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