Piezoelectric T-beam microactuators

Proceedings of the ASME Design Engineering Technical Conference

Volumn 4, Issue , 2008, Pages 909-914

  Kommepalli, Hareesh K R ^a   Hirsh, Andrew D ^a   Rahn, Christopher D ^a   Tadigadapa, Srinivas A ^a  

^a The Center for Nanotechnology Education and Utilization   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIMORPH ACTUATION; BLOCKING FORCES; CROSS-SECTION GEOMETRY; ICP-RIE; IN-PLANE; OUT-OF-PLANE; PIEZOELECTRIC MEMS; PZT;

ACTUATORS; FABRICATION; PIEZOELECTRICITY;

STRUCTURAL DESIGN;

EID: 81155123701     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2008-49886     Document Type: Conference Paper

References (10)

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3. Uchino, K., 2000. Ferroelectric devices. Marcel Dekker, New York.
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9. Cheong, J., Goyal, A., Tadigadapa, S. A., and Rahn, C. D., 2005. "Fabrication and performance of a flextensional microactuator". Journal of Micromechanics and Microengineering, 15, pp. 1947-1955. (Pubitemid 41278287)
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