Novel resonant cavity-enhanced absorber structures for high-efficiency midinfrared photodetector application

Journal of Nanophotonics

Volumn 5, Issue 1, 2011, Pages

  Zohar, Moshe ^a,b   Auslender, Mark ^b   Faraone, Lorenzo ^c   Hava, Shlomo ^b  

^a SAMI SHAMOON COLLEGE OF ENGINEERING   (Israel)

^b BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^c UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Diffraction grating; Numerical optimization; Optical multilayers; Optical resonant cavities

Indexed keywords

CAVITY RESONATORS; COMPUTER AIDED DESIGN; DIFFRACTION GRATINGS; EFFICIENCY; FABRY-PEROT INTERFEROMETERS; LIGHT ABSORPTION; MIRRORS; MULTILAYERS; OPTICAL MULTILAYERS; OPTIMIZATION;

ABSORPTION EFFICIENCY; FABRY-PEROT CAVITY; GRATING STRUCTURES; MID-INFRARED PHOTODETECTORS; NUMERICAL OPTIMIZATIONS; QUARTER-WAVELENGTH; RESONANT CAVITY ENHANCED; THIN SEMICONDUCTOR;

STRUCTURAL DESIGN;

EID: 80755125407     PISSN: None     EISSN: 19342608     Source Type: Journal    
DOI: 10.1117/1.3634057     Document Type: Article

References (45)

1. J.A. Dobrowolski, "Coating and flters," Chap. 8 in Handbook of Optics, W. G. Driscoll and W. Vaughan, Eds., Mc Graw-Hill, New York (1978).
2. O. S. Heavens, Optical Properties of Thin Solid Films (Reprint), Dover Publ., New York (1991).
3. Z. Knittl, Optics of Thin Films (an Optical Multilayer Theory), Wiley, Hoboken, NJ (1976).
4. M. S. Ünlü and S. Strite, "Resonant cavity enhanced photonic devices," J. Appl. Phys. 78, 607-639 (1995).
5. Y. M. El-Batawy and M. J. Deen, "Resonant cavity enhanced photodetectors (RCE-PDs): Structure, material analysis and optimization," Proc. SPIE4999, 363-378 (2003).
6. C.-H. Chen, K. Tetz, and Y. Fainman, "Resonant-cavity-enhanced p-i-n photodiode with a broad quantum-efficiency spectrum by use of an anomalous dispersion mirror," Appl. Opt. 44, 61316140 (2005).
7. J. Kaniewski, J. Muszalski, and J. Piotrowski, "Resonant microcavity enhanced infrared photodetectors," Opt. Appl. 17, 405-413 (2007).
8. J. G. A. Wehner, C. A. Musca, R. H. Sewell, J. M. Dell, and L. Faraone, "Mercury cadmium telluride resonant-cavity-enhanced photoconductive infrared detectors," Appl. Phys. Lett. 87, 211104 (2005).
9. J. G. A. Wehner, C. A. Musca, R. H. Sewell, J. M. Dell, and L. Faraone, "Responsivity and lifetime of resonant-cavity-enhanced Hg Cd Te detectors," Solid State Electron. 50, 1640-1648 (2006).
10. M. Sioma and J. Piotrowski, "Modelling and optimisation ofhigh temperature detectors of long wavelength infrared radiation with optically resonant cavity," Opt. Electron. Rev. 12, 157-160 (2004). (Pubitemid 38604180)
11. C. Nie, R.-L. Jiang, X.-L. Ji, Zi.-L. Xie, B. Liu, P. Han, R. Zhang, and Y.-D. Zheng, "Design and fabrication of Al Ga N-based resonant-cavity enhanced p-i-n UV PDs," IEEE J. Quantum Electron. 45, 575-578 (2009).
12. J. G. A. Wehner, R. H. Sewell, J. Antoszewski, C. A. Musca, J. M. Dell, and L. Faraone, "Mercury cadmium telluride/cadmium telluride distributed Bragg refctors for use with resonant cavity-enhanced detectors,"J Electron. Mater. 34, 710-715 (2005). (Pubitemid 40926010)
13. S. S. Wang and R. Magnusson, "Theory and applications ofguided-mode resonance filters," Appl. Opt. 32, 2606-2613 (1993).
14. S. Hava and M. Auslender, "Silicon grating-based mirror for 1.3-mm polarized beams: MATLAB-aideddesign," Appl. Opt. 34, 1053-1058 (1995).
15. C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther, and C. J. Chang-Hasnain, "Ultrabroadband mirror using low-index cladded subwavelength grating," IEEE Photon. Technol. Lett. 16, 518-520 (2004).
16. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, "Broad-band mirror (1.12-1.62 μ m) using a subwavelength grating," IEEE Photon. Technol. Lett. 16, 1676-1678 (2004).
17. E. Grinvald, T. Katchalski, S. Soria, S. Levit, and A. A. Friesem, "Role of photonic bandgaps in polarization-independent grating waveguide structures," J. Opt. Soc. Am. A 25, 1435-1443 (2008).
18. W. Nakagawa and Y. Fainman, "Tunable optical nanocavity based on modulation of near-field coupling between subwavelength periodic nanostructures," IEEE J. Select. Top. Quan-tum Electron. 10, 478-483 (2004).
19. H.-C. Kim, K. Ikeda, and Y. Fainman, "Resonant waveguide device with vertical gratings," Opt. Lett. 32, 539-541 (2007). (Pubitemid 46363520)
20. E. Bissaillon, D. Tan, B. Faraji, A. G. Kirk, L. Chrostowski, and D. V. Plant, "Highreflec-tivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in Al Ga As/Ga As," Opt. Express 14, 2573-2582 (2006).
21. J. H. Kim, L. Chrostowski, E. Bisaillon, and D. V. Plant, "DBR, sub-wavelength grating, and photonic crystal slab Fabry-Perot cavity design using phase analysis by FDTD," Opt. Express 15, 10330-10339 (2007). (Pubitemid 47230848)
22. A. Rogalski, "Infrared detectors: Status and trends," Progr. Quant. Electron. 27, 59-210 (2003).
23. Y. G. Boucher, A. Chiasera, M. Ferrari, and G. C. Righini, "Extended transfer matrix modeling of an erbium-doped cavity with Si O2/Ti O2 Bragg reflectors," Opt. Mater. 31, 1306 1309 (2009).
24. C. B. Burckhardt, "Diffraction of a plane wave at a sinusoidally stratified dielectric grating," J. Opt. Soc. Am. 56, 1502-1508 (1966).
25. K. Knop, "Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves,"J Opt. Soc. Am. 68, 1206-1210 (1978). (Pubitemid 9407162)
26. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction,"J. Opt. Soc. Am. 71, 811-818 (1981). (Pubitemid 12444661)
27. M. G. Moharam and T. K. Gaylord, "Diffraction analysis ofdielectric surface-reliefgrat-ings,"J Opt. Soc. Am. 72, 1385-1392 (1982).
28. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis ofmetallic surface-reliefgratings,"J. Opt. Soc. Am. A 3, 1780-1787 (1986).
29. N. C. Gallagher and A. J. Whang, "Solving slab lamellar grating problems by the singular-value-decompositionmethod,"J Opt. Soc. Am. A 7, 1701-1711 (1990).
30. D. M. Pai and K. A. Awada, "Analysis of dielectric gratings of arbitrary profiles and thicknesses,"J Opt. Soc. Am. A 8, 755-762 (1991).
31. S. Hava, M. Auslender, and D. Rabinovich, "Operator approach in electromagnetic coupled-wave calculations oflamellar gratings: Infrared optical properties of silicon gratings," Appl. Opt. 33,4807-4813 (1994).
32. L. Li and C. W. Haggans, "Convergence of the coupled-wave method for metallic lamellar diffractiongratings,"J Opt. Soc. Am. A 10, 1184-1189 (1993). (Pubitemid 23677046)
33. N. Chateau and J.-P. Hugonin, "Algorithm for the rigorous coupled-wave analysis ofgrating diffraction,"J. Opt. Soc. Am. A 11, 1321-1331 (1994).
34. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis ofbinary gratings," J. Opt. Soc. Am. A 12, 1068-1076 (1995).
35. L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layereddiffractiongratings,"J Opt. Soc. Am. A 13, 1024-1035 (1996). (Pubitemid 126574821)
36. P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization," J. Opt. Soc. Am. A 13, 779-784 (1996). (Pubitemid 126576933)
37. G. Granet and B. Guizal, "Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization," J. Opt. Soc. Am. 13, 1019-1023 (1996). (Pubitemid 126574820)
38. M. Auslender and S. Hava, "S-matrix propagation algorithm for electromagnetics ofmul-tilayer grating structures," Proc. SPIE 2689, 66-79 (1996).
39. M. Auslender and S. Hava, "Scattering-matrix propagation algorithm in full-vectorial optics ofmultilayergrating structures," Opt. Lett. 21, 1765-1767 (1996). (Pubitemid 126569145)
40. L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A 13, 1870-1876 (1996). (Pubitemid 126548544)
41. L. G. Parratt,"Surfacestudiesof solidsbytotalreflectionof X-rays,"Phys. Rev. 95,359-369 (1954).
42. M. Auslender, A. Bergel, N. Pinhas, and S. Hava, "Multi-layered grating diffraction, graph-ical user interfaced simulation toolbox in the MATLAB® environment," Proc. SPIE 5349, 463-473 (2004).
43. E. D. Palik, Ed., Handbook of Optical Constants of Solids, Vols. I-III, Academic Press, New York (1985-1998). Sopra SA Company Database, http://www.sopra-sa.com (accessed on 07/08/1998).
44. P. M. Amirtharaj, "Mercury cadmium telluride," in Handbook of Optical Constants of Solids, E. D. Palik, Ed., Vol. II, pp. 655-689, Academic Press, New York (1997).
45. P. Lalanne, "Waveguiding in blazed-binary difiactive elements," J. Opt. Soc. Am. A 16 2517-2520 (1999).