Resonant-cavity-enhanced p-i-n photodiode with a broad quantum-efficiency spectrum by use of an anomalous-dispersion mirror

Applied Optics

Volumn 44, Issue 29, 2005, Pages 6131-6140

  Chen, Chyong Hua ^a   Tetz, Kevin ^a   Fainman, Yeshaiahu ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LIGHT TRANSMISSION; MIRRORS; OPTICAL FILTERS; QUANTUM EFFICIENCY; SEMICONDUCTING INDIUM PHOSPHIDE;

ANOMALOUS-DISPERSION MIRROR; FWHM; QUANTUM-EFFICIENCY SPECTRUM;

PHOTODIODES;

EID: 27844465982     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.006131     Document Type: Article

References (20)

1. K. Kishino, M. S. Unlu, J.-I. Chyi, J. Reed, L. Arsenault, and H. Morkoc, "Resonant cavity-enhanced (RCE) photodetectors," IEEE J. Quantum Electron. 27, 2025-2034 (1991).
2. M. S. Unlu, K. Kishino, H. J. Liaw, and H. Morkoc, "A theoretical study of resonant cavity-enhanced photodetectors with Ge and Si active regions," J. Appl. Phys. 71, 4049-4058 (1992).
3. M. S. Unlu and S. Strite, "Resonant cavity enhanced photonic devices," J. Appl. Phys. 78, 607-39 (1995).
4. K. Liu, Y. Huang, and X. Ren, "Theory and experiments of a three-cavity wavelength-selective photodetector," Appl. Opt. 39, 4263-4269 (2000).
5. H.-H. Tung and C.-P. Lee, "Design of a resonant-cavityenhanced photodetector for high-speed applications," IEEE J. Quantum Electron. 33, 753-60 (1997).
6. M. Gokkavas, G. Ulu, O. Dosunmu, R. P. Mirin, and M. S. Unlu, "Resonant cavity enhanced photodiodes with a broadened spectral peak," in 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Institute of Electrical and Electronics Engineers, 2001), Vol. 2, pp. 768-769.
7. S. Y. Hu, E. R. Hegblom, and L. A. Coldren, "Coupled-cavity resonant photodetectors for high-performance wavelength demultiplexing applications," Appl. Phys. Lett. 71, 178-180 (1997).
8. Y. Zhong, Z. Pan, L. Li, Y. Huang, and X. Ren, "Proposition of a nearly rectangular response resonant cavity enhanced (RCE) photodetector," in Semiconductor Optoelectronic Device Manufacturing and Applications, D. Chen, ed., Proc. SPIE 4602, 74-78 (2001).
9. F. Y. Huang, A. Salvador, X. Gui, N. Teraguchi, and H. Morkoc, "Resonant-cavity GaAs/InGaAs/AIAs photodiodes with a periodic absorber structure," Appl. Phys. Lett. 63, 141-143 (1993).
10. A. Srinivasan, S. Murtaza, J. C. Campbell, and B. G. Streetman, "High quantum efficiency dual wavelength resonantcavity photodetector," Appl. Phys. Lett. 66, 535-537 (1995).
11. B. Temelkuran, E. Ozbay, J. P. Kavanaugh, G. Tuttle, and K. M. Ho, "Resonant cavity enhanced detectors embedded in photonic crystals," Appl. Phys. Lett. 72, 2376-2378 (1998).
12. Y. H. Zhang, H. T. Luo, and W. Z. Shen, "Study on the quantum efficiency of resonant cavity enhanced GaAs far-infrared detectors," J. Appl. Phys. 91, 5538-5544 (2002).
13. C. Li, Q. Yang, H. Wang, J. Yu, Q. Wang, Y. Li, J. Zhou, H. Huang, and X. Ren, "Back-incident SiGe-Si multiple quantum-well resonant-cavity-enhanced photodetectors for 1.3-μm operation," IEEE Photon. Technol. J. 12, 1373-1375 (2000).
14. A. Thelen, Design of Optical Interference Coatings (McGraw-Hill, 1989), p. 20.
15. Y. V. Troitski, "Dispersion-free, multiple-beam interferometer, " Appl. Opt. 34, 4717-4722 (1995).
16. E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1998), Vols. I and III.
17. W. Kowalsky and J. Mahnss, "Monolithically integrated InGaAIAs dielectric reflectors for vertical cavity optoelectronic devices," Appl. Phys. Lett. 59, 1011-1012 (1991).
18. Y. Y. Troitski, "Dielectric mirrors with the anomalous dispersion of the reflection phase," Opt. Spectros. 77, 503-506 (1994).
19. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001).
20. M. J. Mondry, D. I. Babic, J. E. Bowers, and L. A. Coldren, "Refractive-indexes of (Al, Ga, In) As epilayers on InP for optoelectronic applications," IEEE Photon. Technol. Lett. 4, 627-630 (1992).