Fabrication of a miniaturized thin-film temperature sensor on a sapphire fiber tip

IEEE Sensors Journal

Volumn 11, Issue 12, 2011, Pages 3406-3408

  Wang, Jiajun ^a   Lally, Evan M ^a   Dong, Bo ^a   Gong, Jianmin ^a   Wang, Anbo ^a  

^a State University   (United States)

Author keywords

Coating; fiber sensor; high temperature; sapphire; tantalum pentoxide; thin film

Indexed keywords

BATCH FABRICATION; BATCH PRODUCTION; ELECTRON BEAM EVAPORATION; EMBEDDED SENSING; FIBER SENSOR; HARSH ENVIRONMENT; HIGH TEMPERATURE; LOW-COHERENCE; OPTICAL INTERFEROMETRY; SAPPHIRE FIBER; TANTALUM PENTOXIDE;

SAPPHIRE; TANTALUM; TANTALUM OXIDES;

TEMPERATURE SENSORS;

EID: 80455155198     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2160340     Document Type: Article

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