Piezoelectric biosensor platform based on ZnO micro membrane

Current Applied Physics

Volumn 11, Issue 3 SUPPL., 2011, Pages

  Lu, Xu ^a   Xu, Zhuo ^a   Yan, Xingwei ^a   Li, Shaokang ^a   Ren, Wei ^a   Cheng, Zhongyang ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b AUBURN UNIVERSITY   (United States)

Author keywords

Biosensor; Membrane; Stress; Vibration

Indexed keywords

BIO-SENSOR PLATFORMS; DIFFERENT SIZES; MASS SENSITIVITY; MEMBRANE DEVICES; MEMS TECHNOLOGY; PIEZOELECTRIC BIOSENSORS; POTENTIAL APPLICATIONS; RESONANCE FREQUENCIES; THIN-FILM DEPOSITIONS; VIBRATION BEHAVIOR; VIBRATION MODES; ZNO; ZNO DEVICES; ZNO THIN FILM;

DEPOSITION; FLEXIBLE STRUCTURES; MEMBRANES; PIEZOELECTRICITY; RESONANCE; THIN FILMS; VAPOR DEPOSITION; VIBRATION ANALYSIS; ZINC OXIDE;

BIOSENSORS;

EID: 80255129351     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2011.03.006     Document Type: Conference Paper

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