Visually guided 3D micro positioning and alignment system

International Journal of Precision Engineering and Manufacturing

Volumn 12, Issue 5, 2011, Pages 797-803

  Kim, Jung Hyun ^a  

^a Kyungsung University   (South Korea)

Author keywords

Force estimation; Micro manipulation; Microscopy; White light interferometry

Indexed keywords

EID: 80155156843     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-011-0106-8     Document Type: Article

References (22)

1. Kim, J. H. and Menq, C.-H., "Visual Servo Control Achieving Nanometer Resolution in X-Y-Z," IEEE Trans. on Robotics, Vol. 25, No. 1, pp. 109-116, 2009.
2. Arai, F., Morishima, K., Kasugai, T. and Fukuda, T., "Bio-Micromanipulation," Proc. of the 1997 IEEE/RSJ International Conference on Intelligent Robot and Systems, pp. 1300-1305, 1997.
3. Ralis, S. J., Vikramaditya, B. and Nelson, B. J., "Micropositioning of a Weakly Calibrated Microassembly System Using Coarse-to-Fine Visual Servoing Strategies," IEEE Trans. on Electronics Packaging Manufacturing, Vol. 23, No. 2, pp. 123-131, 2000.
4. Vikramaditya, B., "Visually Guided Microassembly Using Optical Microscopes and Active Vision Techniques," Proc. 1997 IEEE Int. Conf. on Robotics and Automation, Vol. 4, pp. 3172-3177, 1997.
5. Fearing, R. S., "Survey of Sticking Effects for Micro Parts Handling," Proc. of the 1995 IEEE/RSJ Int. Conf. on Intelligent Robots and Sysems, Vol. 2, pp. 212-217, 1995.
6. Barnard, S. T. and Fischler, M. A., "Computational stereo," ACM Computing Surveys, Vol. 14, No. 4, pp. 553-572, 1982.
7. Dhond, U. R. and Aggarwal, J. K., "Structure from stereo: a review," IEEE Trans. on System, Man, and Cybertics, Vol. 19, No. 6, pp. 1489-1510, 1989.
8. Roy, S. and Cox, I. J., "A maximum-flow formulation of the N-camera stereo correspondence problem," Proc. of IEEE Int. Conf. on Computer Vision, pp. 492-499, 1998.
9. Horn, B. P. K., "Focusing," MIT Artificial Intelligence Lab Memo No. 160, 1968.
10. Jarvis, R. A., "A perspective on range finding techniques for computer vision," IEEE Trans. on Pattern Analysis and Machine Intelligence, Vol. 5, No. 2, pp. 122-139, 1983.
11. Watanabe, M. and Nayar, S. K., "Rational Filters for Passive Depth from Defocus," International Journal of Computer Vision, Vol. 27, No. 3, pp. 203-225, 1998.
12. Takeda, M. and Mutoh, K., "Fourier transform profilometry for the automatic measurement of 3-D object shapes," Applied Optics, Vol. 22, No. 24, pp. 3977-3982, 1983.
13. Windecker, R., Fleischer, M. and Tiziani, H. J., "Three-dimensional topometry with stereo microscopes," Opt. Eng., Vol. 36, No. 12, pp. 3372-3377, 1997.
14. Debnath, S. K., You, J. and Kim, S.-W., "Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry," Int. J. Preecis. Eng. Manuf., Vol. 10, No. 5, pp. 5-10, 2009.
15. Dresel, T., Haeusler, G. and Venzke, H., "Three-dimensional sensing of rough surfaces by coherence radar," Applied Optics, Vol. 31, No. 7, pp. 919-925, 1992.
16. Kino, G. S. and Chim, S., "Mirau correlation microscope," Applied Optics, Vol. 29, No. 26, pp. 3775-3783, 1990.
17. Caber, P. J., "Interferometric profiler for rough surfaces," Applied Optics, Vol. 32, No. 19, pp. 3438-3441, 1993.
18. Fleischer, M., Windecker, R. and Tiziani, H. J., "Theoretical limits of scanning white-light interferometry signal evaluation algorithm," Applied Optics, Vol. 40, No. 17, pp. 2815-2820, 2001.
19. Kuo, S.-K. and Menq, C. H., "Modeling and Control of a Six-Axis Precision Motion Control Stage," IEEE/ ASME Trans. on Mechatronics, Vol. 10, No. 1, pp. 50-59, 2005.
20. Hutchinson, S. A., Hager, G. D. and Corke, P. I., "A tutorial on visual servo control," IEEE Trans. on Robot. Automat., Vol. 12, No. 5, pp. 651-670, 1996.
21. Craig, J. J., "Introduction to Robotics: Mechanics and Control, 2nd Ed.," Addison-Wesley, 1989.
22. Born, M. and Wolf, E., "Principles of Optics, 7th ed," Cambridge University Press, 1999.