Microstructure and properties of nc-TiC/a-C:H films deposited by radio frequency reactive sputtering

Materials Science and Technology

Volumn 27, Issue 11, 2011, Pages 1669-1673

  Liu, X Q ^a,b   Yang, J ^a   Hao, J Y ^a   Liu, W M ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Amorphous carbon films; Lubrication; Nanostructure; Radio frequency sputtering; Titanium carbide

Indexed keywords

MECHANICAL AND TRIBOLOGICAL PROPERTIES; MICROSTRUCTURE AND PROPERTIES; N TYPE SILICON; NANOCRYSTALLINE PARTICLE; NC-TIC/A-C:H; RADIO FREQUENCY SPUTTERING; RADIO-FREQUENCY REACTIVE SPUTTERING; TI CONTENT; TITANIUM TARGETS; TRIBOMETERS; XRD;

AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOINDENTATION; NANOSTRUCTURES; PHOTOELECTRON SPECTROSCOPY; POLYMER FILMS; RADIO; RADIO WAVES; RAMAN SPECTROSCOPY; TITANIUM; TITANIUM CARBIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 80054992974     PISSN: 02670836     EISSN: 17432847     Source Type: Journal    
DOI: 10.1179/1743284710Y.0000000025     Document Type: Article

References (15)

1. O. Wilhelmsson, M. Rasander, M. Carlsson, E. Lewin, B. Sanyal, U. Wiklund, O. Eriksson and U. Jansson: 'Design of nanocom-posite low-friction coatings', Adv. Funct. Mater., 2007, 17, (10), 1611-1616.
2. Y. T. Pei, D. Galvan and J. T. M. de Hosson: 'Nanostructure and properties of TiC/a-C:H composite coatings', Acta Mater., 2005, 53, (17), 4505-4521. (Pubitemid 41263378)
3. D. Galvan, Y. T. Pei and J. T. M. de Hosson: 'Reactive magnetron sputtering deposition and columnar growth of nc-TiC/a-C:H nanocomposite coatings', J. Vac. Sci. Technol. A, 2006, 24A, (4), 1441-1447. (Pubitemid 43959182)
4. Y. T. Pei, D. Galvan, J. T. M. de Hosson and C. Strondl: 'Advanced TiC/a-C:H nanocomposite coatings deposited by magnetron sputtering', J. Eur. Ceram. Soc., 2006, 26, (4-5), 565-570. (Pubitemid 43040428)
5. Y. T. Pei, D. Galvan, J. T. M. de Hosson and A. Cavaleiro: 'Nanostructured TiC/a-C coatings for low friction and wear resistant applications', Surf. Coat. Technol., 2005, 198, (1-3), 44-50. (Pubitemid 40854658)
6. Y. T. Pei, D. Galvan and J. T. M. de Hosson: 'Tribological behavior and thermal stability of TiC/a-C:H nanocomposite coatings', J. Vac. Sci. Technol. A, 2006, 24A, (4), 1448-1453. (Pubitemid 43959183)
7. W. Gulbinski, S. Mathur, H. Shen, T. Suszko, A. Gilewicz and B. Warcholinski: 'Evaluation of phase, composition, microstruc-ture and properties in TiC/a-C: H thin films deposited by magnetron sputtering', Appl. Surf. Sci., 2005, 239, (3-4), 302-310.
8. Y. T. Pei, C. Q. Chen, K. P. Shaha, J. T. M. de Flosson, J. W. Bradley, S. A. Voronin and M. Cada: 'Microstructural control of TiC/a-C nanocomposite coatings with pulsed magnetron sputtering', Acta Mater., 2008, 56, (4), 696-709. (Pubitemid 351179425)
9. A. C. Ferrari: 'Determination of bonding in diamond-like carbon by Raman spectroscopy', Diamond Relat. Mater., 2002, 11, (3-6), 1053-1061. (Pubitemid 34696395)
10. A. C. Ferrari and J. Robertson: 'Interpretation of Raman spectra of disordered and amorphous carbon', Phys. Rev. B, 2000, 61B, (20), 14095-14107.
11. G. Irmer and A. Dorner-Reisel: 'Micro-Raman studies on DLC coatings', Adv. Eng. Mater., 2005, 7, (8), 694-705. (Pubitemid 41353035)
12. M. A. Tamor and W. C. Vassell: 'Raman fingerprinting of amorphous-carbon films', J. Appl. Phys., 1994, 76, (6), 3823-3830.
13. A. Leyland and A. Matthews: 'On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour', Wear, 2000, 246, (1-2), 1-11.
14. C. E. Carlton and P. J. Ferreira: 'What is behind the inverse Hall-Petch effect in nanocrystalline materials?', Acta Mater., 2007, 55, (11), 3749-3756. (Pubitemid 46755677)
15. Y. J. Wang, J. Z. Zhang and Y. S. Zhao: 'Strength weakening by nanocrystals in ceramic materials', Nano Lett., 2007, 7, (10), 3196-3199