Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings

Physics of Metals and Metallography

Volumn 112, Issue 2, 2011, Pages 188-195

  Sobol, O V ^a   Pogrebnyak, A D ^b   Beresnev, V M ^c  

^a NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

^b SUMY STATE UNIVERSITY   (Ukraine)

^c INSTITUTE OF HYDROBIOLOGY   (Ukraine)

Author keywords

Compressive stresses; Hardness; Phase composition; Structure; Vacuum arc coating; X ray diffraction analysis; Zr Ti Si N system

Indexed keywords

BIAS POTENTIAL; CRYSTALLINE STATE; FILM-FORMING; FILM-FORMING PARTICLES; HIGH HARDNESS; HIGH MECHANICAL PROPERTIES; MECHANICAL CHARACTERISTICS; NANO METER RANGE; NITROGEN ATMOSPHERES; PREPARATION CONDITIONS; REACTIVE NITROGEN; STRUCTURAL STATE; TECHNOLOGICAL SCHEME; VACUUM-ARC COATING; WORKING PRESSURES; ZR-TI-SI-N SYSTEM;

COATINGS; CRYSTALLITES; FILM GROWTH; HARDNESS; PHASE COMPOSITION; SILICON; STRESSES; VACUUM; VACUUM EVAPORATION; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM;

TITANIUM NITRIDE;

EID: 80054909116     PISSN: 0031918X     EISSN: None     Source Type: Journal    
DOI: 10.1134/S0031918X11020268     Document Type: Article

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