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Volumn 91, Issue 1, 2001, Pages 63-72
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Phase composition, structure, and stressed state of tungsten films produced by ion-plasma sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
ALLOYING ELEMENTS;
CARBON;
COATINGS;
COMPOSITION;
FILMS;
OXYGEN;
PHASE COMPOSITION;
SPUTTERING;
STRESSES;
ION PLASMA SPUTTERING;
TUNGSTEN;
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EID: 2542636328
PISSN: 00153230
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (0)
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