Nanopillars by calcium chloride self-assembly and dry etching

Materials Letters

Volumn 67, Issue 1, 2012, Pages 323-326

  Liao, Y X ^a   Liu, J ^a   Wang, B ^a   Yi, F T ^a  

^a INSTITUTE OF HIGH ENERGY PHYSICS   (China)

Author keywords

Dry etching; Nanopillars; Self assembly; Texture; Thin films

Indexed keywords

CALCIUM CHLORIDE; CESIUM COMPOUNDS; DRY ETCHING; LITHIUM-ION BATTERIES; NANODOTS; NANOSTRUCTURES; SELF ASSEMBLY; SUBSTRATES; TEXTURES;

CESIUM CHLORIDE; CRYSTALLINE HYDRATES; ETCH RESISTANCE; FABRICATION METHOD; LONG RANGE ORDERS; NANOPILLARS; SUBSTRATE MOISTURE CONTENTS; UNEVEN SURFACES;

THIN FILMS;

EID: 80054857701     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2011.08.116     Document Type: Article

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