Development of autonomous maintenance implementation framework for semiconductor industries

International Journal of Industrial and Systems Engineering

Volumn 9, Issue 3, 2011, Pages 268-297

  Min, Chen Shin ^a   Ahmad, Rosmaini ^a   Kamaruddin, Shahrul ^a   Azid, Ishak Abdul ^a  

^a SCHOOL OF CHEMICAL ENGINEERING   (Malaysia)

Author keywords

AM; Autonomous maintenance; Implementation framework; Semiconductor industry; Total productive maintenance; TPM

Indexed keywords

AMERICIUM; SEMICONDUCTOR DEVICE MANUFACTURE;

HUMAN CAPITAL DEVELOPMENT; IMPLEMENTATION FRAMEWORK; IMPLEMENTATION PROCESS; MAINTENANCE ACTIVITY; MAINTENANCE STRATEGIES; SEMICONDUCTOR COMPANIES; SEMICONDUCTOR INDUSTRY; TOTAL PRODUCTIVE MAINTENANCE;

MAINTENANCE;

EID: 80054812787     PISSN: 17485037     EISSN: 17485045     Source Type: Journal    
DOI: 10.1504/IJISE.2011.043139     Document Type: Article

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