Physical properties of Al-doped MgZnO film grown by RF magnetron sputtering using ZnO/MgO/Al2O3 target

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8110, Issue , 2011, Pages

  Hsueh, Kuang Po ^a   Cheng, Yi Chang ^a   Lin, Wen Yen ^a   Chiu, Hsien Chin ^b   Huang, Yu Ping ^c   Chi, Gou Chung ^c   Liu, Wei Sheng ^d  

^a VANUNG UNIVERSITY   (Taiwan)

^b CHANG GUNG UNIVERSITY   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^d YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Al2O3; MgO; Sputtering system; Transparent conductive oxide; Transparent performance; X ray diffraction; X ray photoelectron spectroscopy; ZnO

Indexed keywords

MGO; SPUTTERING SYSTEM; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT PERFORMANCE; ZNO;

ABSORPTION SPECTROSCOPY; ANNEALING; DIFFRACTION; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNETRON SPUTTERING; OXYGEN; OXYGEN VACANCIES; PHOTOELECTRICITY; PHOTOELECTRON SPECTROSCOPY; PHOTONS; PHYSICAL PROPERTIES; SEMICONDUCTOR DOPING; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC OXIDE;

ALUMINUM;

EID: 80054060449     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.891269     Document Type: Conference Paper

References (6)

1. J. O. Song, K. K. Kim, S. J. Park, and T. Y. Seong, "Highly low resistance and transparent Ni/ZnO ohmic contacts to p-type GaN, "Appl. Phys. Lett. 83, 479-481 (2003).
2. C. J. Tun, J. K. Sheu, B. J. Pong, M. L. Lee, M. Y. Lee, C. K. Hsieh, C. C. Hu, and G. C. Chi, "Enhanced Light Output of GaN-Based Power LEDs With Transparent Al-Doped ZnO Current Spreading Layer, " IEEE Photonics Technol. Lett. 18, 274-276 (2006).
3. 1-xO alloy films, " Appl. Phys. Lett. 80, 1529-1531 (2002).
4. V. Gupta and A. Mansingh, "Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film, " J. Appl. Phys., 80, 1063-1073 (1996).
5. 2 on MgO thin film surfaces, " Surf. Sci. 224, 327-347 (1989).
6. J. K. Sheu, K. W. Shu, M. L. Lee, C. J. Tun, and G. C. Chi, "Effect of Thermal Annealing on Ga-Doped ZnO Films Prepared by Magnetron Sputtering, " Journal of The Electrochemical Society, 154(6), H521-H524 (2007).