A study on response properties of surface texture measuring instruments in terms of surface wavelength

Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010

Volumn 49, Issue , 2010, Pages 91-96

  Fujii, Akihiro ^a   Suzuki, Hitoshi ^a   Yanagi, Kazuhisa ^b  

^a OLYMPUS CORPORATION   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 80053921998     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu "Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry," APPLIED OPTICS, Vol. 44, pp5919-5927 (2005)
2. th 2008, pp135-142,
3. Richard Leach, "Fundamental principles of engineering nano-metrology," Micro & nano technologies Oxford: Elsevier Inc., (2010), pp165-167
4. http://www.rubert.co.uk/
5. ISO4287: 1997: Geometrical Product Specifications (GPS) - Surface texture: Profile method - Terms, definitions and surface texture parameters
6. Fukatsu H, Oka K, Yanagi K, "Analysis of diffraction image caused by micro-geometry for an optical profiling sensor," 2006 JSPE Spring meeting, N-62 (2006) 1101. (in Japanese)
7. ISO3274: 1996: Geometrical Product Specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments, Annex B
8. ISO12233: 2000: Photography - Electronic still-picture cameras - Resolution measurements
9. Oldenbourg, R., S. Inoue, R. Tiberio, A. Stemmer, G. Mei, and M. Skvarla Standard test target for high resolution light microscopy. In: Nanofabrication and Biosystems (H.C. Hoch, L.W. Jelinski, and H.G. Craighead, eds.), (1996), pp123-138, Cambridge University Press, New York [Section 2.4.4]