SCOPUS 정보 검색 플랫폼

Volumn 1378, Issue , 2011, Pages 168-173

NanoXCT - A high-resolution technique for TSV characterization

Author keywords

Process control; Quality control; TSV; X ray microscopy; X ray tomography

Indexed keywords

EID: 80053651389 PISSN: 0094243X EISSN: 15517616 Source Type: Conference Proceeding
DOI: 10.1063/1.3615703 Document Type: Conference Paper

Times cited : (17)

References (11)

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