Developing a Tω (the weakest t-norm) fuzzy GERT for evaluating uncertain process reliability in semiconductor manufacturing

Applied Soft Computing Journal

Volumn 11, Issue 8, 2011, Pages 5165-5180

  Lin, Kuo Ping ^a   Wu, Ming Jia ^a   Hung, Kuo Chen ^b   Kuo, Yiyo ^c  

^a LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^c HSING KUO UNIVERSITY OF MANAGEMENT   (Taiwan)

Author keywords

Fuzzy GERT; Graphical Evaluation and Review Technique (GERT); Lithography area; The weakest t norm arithmetic operations

Indexed keywords

300-MM MANUFACTURING; ARITHMETIC OPERATIONS; COMPLEX MANUFACTURING SYSTEMS; FUZZY ARITHMETICS; FUZZY GERT; FUZZY GERT MODELS; FUZZY SUPPORT; GRAPHICAL EVALUATION AND REVIEW TECHNIQUE; MANUFACTURING PROCESS; MODEL CALCULATIONS; PROCESSING MODEL; REALISTIC ENVIRONMENTS; SEMICONDUCTOR MANUFACTURING; SIMULATION TECHNOLOGIES; THE WEAKEST T-NORM ARITHMETIC OPERATIONS; TRADITIONAL SYSTEMS; UNCERTAIN ENVIRONMENTS; UNCERTAIN PROCESS;

FUZZY SET THEORY; FUZZY SETS; FUZZY SYSTEMS; INDUSTRIAL ENGINEERING; LITHOGRAPHY; MANUFACTURE; MEMBERSHIP FUNCTIONS; PRODUCTION ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE;

CRITICAL PATH ANALYSIS;

EID: 80053569675     PISSN: 15684946     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.asoc.2011.05.043     Document Type: Article

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