Nanopatterned platinum electrodes by focused ion beam in single palladium nanowire based devices

Microelectronic Engineering

Volumn 88, Issue 11, 2011, Pages 3261-3266

  La Ferrara, Vera ^a   Alfano, Brigida ^a   Fiorentino, Giuseppe ^b   Polichetti, Tiziana ^a   Massera, Ettore ^a   Di Francia, Girolamo ^a  

^a ENEA CR Portici   (Italy)

^b UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

Dielectrophoresis; Focused ion beam; Hydrogen sensor; Single palladium nanowire

Indexed keywords

FIXED FREQUENCY; HYDROGEN SENSOR; PALLADIUM NANOPARTICLES; PALLADIUM NANOWIRES; PLATINUM ELECTRODES; ROOM TEMPERATURE; SINGLE PALLADIUM NANOWIRE;

ELECTRIC FIELDS; ELECTRODES; ELECTROPHORESIS; FOCUSED ION BEAMS; HYDROGEN; IONS; PLATINUM; SENSORS;

NANOWIRES;

EID: 80053365830     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.06.012     Document Type: Article

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