A low power catalytic combustion gas sensor based on a suspended membrane microhotplate

NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Volumn , Issue , 2011, Pages 92-95

  Xu, Lei ^a   Li, Tie ^a   Gao, Xiuli ^a   Wang, Yuelin ^a   Zheng, Rui ^b   Xie, Lei ^b   Lee, Lichung ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b RAE Systems Inc   (China)

Author keywords

catalytic combustion gas sensor; methane; microhotplate; Pd Pt

Indexed keywords

CATALYTIC COMBUSTION; LINEAR RELATIONSHIPS; LOW POWER; LOW-POWER CONSUMPTION; METHANE GAS; METHANE GAS CONCENTRATION; MICRO HOTPLATE; MICROMACHINING PROCESS; OUTPUT SIGNAL; PD-PT; SENSITIVE MATERIALS; SENSOR OUTPUT; SILICON SUBSTRATES; SUSPENDED MEMBRANES; WORKING VOLTAGE;

CATALYSIS; COMBUSTION; GAS DETECTORS; METHANE; MICROMACHINING; PLATINUM; SENSORS; SOL-GEL PROCESS;

GASES;

EID: 80053323724     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2011.6017303     Document Type: Conference Paper

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